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Radius of curvature of microcantilever biosensor

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I want to apply surface stress induced force on the microcantilever biosensor, where I make use of stoney's equation, and to calculate surface stress I have an equation Where curvature is directly proportional to surface stress. Now Im not getting how to calculate curvature of microcantilever biosensor (substrate: silicon and sensing layer: gold).

0 Replies Last Post Feb 21, 2017, 2:18 a.m. EST
COMSOL Moderator

Hello Pallavi Sajjan

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