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Defining geometry of microsprings in MEMS
Posted May 5, 2011, 2:20 p.m. EDT Low-Frequency Electromagnetics, MEMS & Nanotechnology, MEMS & Piezoelectric Devices 1 Reply
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Hello,
I am trying to model the capacitor based micro trampoline as mentioned in the paper that I have attached.
I'll briefly summarize the design. It consists of two capacitor plates, one fixed and the other mobile. The fixed plate is mounted on four springs, made out of a serpentile shape (one rod, zigzagging, that is, goes right, down, left, down, right and so on.). The mobile spring plate has four supports that help avoiding adhesion to the fixed plate.
My question is, after loading a standard capacitor model, how do I go about adding the four supports to the mobile plate geometry? Also, What should be the steps to draw the serpentile geometry of the spring? How do I couple it with the capacitor geometry and physics?
Also, what Physics studies should be used for making the springs behave like a Spring? Stress/Strain?
I am trying to model the capacitor based micro trampoline as mentioned in the paper that I have attached.
I'll briefly summarize the design. It consists of two capacitor plates, one fixed and the other mobile. The fixed plate is mounted on four springs, made out of a serpentile shape (one rod, zigzagging, that is, goes right, down, left, down, right and so on.). The mobile spring plate has four supports that help avoiding adhesion to the fixed plate.
My question is, after loading a standard capacitor model, how do I go about adding the four supports to the mobile plate geometry? Also, What should be the steps to draw the serpentile geometry of the spring? How do I couple it with the capacitor geometry and physics?
Also, what Physics studies should be used for making the springs behave like a Spring? Stress/Strain?
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1 Reply Last Post May 5, 2011, 2:25 p.m. EDT
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Posted:
1 decade ago
Also, can I import the capacitors from the accelerometer 3D model in the model library?