Menu

Discussion Forum

New Discussion
Filter

Note: This discussion is about an older version of the COMSOL Multiphysics® software. The information provided may be out of date.

Discussion Closed This discussion was created more than 6 months ago and has been closed. To start a new discussion with a link back to this one, click here.

Unequal electrostatic force for a MEMS switch

Posted Apr 12, 2012, 2:40 p.m. EDT MEMS & Nanotechnology, MEMS & Piezoelectric Devices Version 3.5a 0 Replies

Sijing Han
Send Private Message Flag post as spam

Please login with a confirmed email address before reporting spam

Hello all,

I am trying to model a MEMS switch using Solid, Stress-Strain, Moving Mesh and Electrostatics (emes). The switch is constructed by two bridges with two electrodes on them. A thin insulator layer is coated on one electrode to prevent short. I applied voltage on the electrodes and electrostatic force causes the bridges move close. The electrostatics forces on two bridge should be equal in opposite sign. However, postprocessing result showed one is larger than the other one. Does anyone have ideas on the problem? I attached image for the structure.

Thanks!

Attachments:

0 Replies Last Post Apr 12, 2012, 2:40 p.m. EDT
COMSOL Moderator

Hello Sijing Han

Your Discussion has gone 30 days without a reply. If you still need help with COMSOL and have an on-subscription license, please visit our Support Center for help.

If you do not hold an on-subscription license, you may find an answer in another Discussion or in the Knowledge Base.

Note that while COMSOL employees may participate in the discussion forum, COMSOL® software users who are on-subscription should submit their questions via the Support Center for a more comprehensive response from the Technical Support team.

Suggested Content