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Posted Aug 16, 2012, 11:22 AM EDT MEMS & Nanotechnology, MEMS & Nanotechnology, Materials, Modeling Tools, Parameters, Variables, & Functions Version 4.2a, Version 4.3 0 Replies
I have a question regarding material parameter of Si3N4.
In the library it is mentioned that "Elasticity Matrix" of Si3N4 is 100 Pa.
I just wondered How they calculate this value. Because I need to fill this for other material (Poly-Si) But I have no Idea where I can find It.
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