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mems based capacitive type humidity sensor
Posted Nov 22, 2013, 5:10 a.m. EST MEMS & Nanotechnology, Fluid & Heat, MEMS & Piezoelectric Devices, Microfluidics, Chemical Reaction Engineering, Structural Mechanics Version 4.3, Version 4.3a, Version 4.3b, Version 5.2a 1 Reply
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I am working on capacitive type humidity sensor in which I've to model diffusion of humidity in polymide layer that will change the permittivity of polymide hence changing the capacitance between electrodes in which polymide layer was sandwiched but I don't know which physics to use i'm new to comsol . I guess it's gonna be a complex structure so I decided to model diffusion in polymide first but again i don't know which physics to use and which material to use for humidity( should i use a material named "HumidAir" in COMSOL 4.3 ? would i be able to change it's parameters ?)
Thanks.
Hello Abhishek Rai
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I'm working on the same subject and i have the same problem you had. I would like to know what physics to use for the capacitive humidity sensor.
Thank you for your help,
Kind regards.