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Lines intersecting when extruding
Posted Oct 30, 2015, 3:42 p.m. EDT MEMS & Nanotechnology, MEMS & Piezoelectric Devices, Geometry, Materials, Parameters, Variables, & Functions, Results & Visualization Version 5.0 1 Reply
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The devices I'm drawing in COMSOL 5.0 have very narrow gaps (as they are fabricated using DRIE in MEMS). I can draw the geometry fine in 2D but when I extrude the device the geometry is made coarser and lines that are parallel and close together (0.7um apart for a 600um device) in 2D will intersect in 3D. Is there a setting to make the 3D extrusion less coarse so these lines don't intersect?
One solution is that I union each shape and do NOT "keep interior boundaries". However, the device is still very coarse. Sometimes I need interior boundaries, but even if I get rid of them how can I refine the 3D component?
One solution is that I union each shape and do NOT "keep interior boundaries". However, the device is still very coarse. Sometimes I need interior boundaries, but even if I get rid of them how can I refine the 3D component?
1 Reply Last Post Oct 31, 2015, 5:20 a.m. EDT
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Posted:
9 years ago
Hi
Have you tried to play with the "geometrical relative tolerance" variable, it appears in different main geometrical nodes (Geometry, WorkPlanes, Union ...)
But be aware that such geometries tend to make the mesh count explode ...
--
Good luck
Ivar
Have you tried to play with the "geometrical relative tolerance" variable, it appears in different main geometrical nodes (Geometry, WorkPlanes, Union ...)
But be aware that such geometries tend to make the mesh count explode ...
--
Good luck
Ivar