A 3D Biased Resonator: Stationary, Eigenfrequency, Frequency Domain, and Pull-In Analyses

Application ID: 11748

An electrostatically actuated MEMS resonator is simulated in the time and frequency domains. The device is driven by an AC + DC bias voltage applied across a parallel plate capacitor. The dependence of the resonant frequency on DC bias is assessed, and frequency domain and transient analyses are performed to investigate the device performance.

This model example illustrates applications of this type that would nominally be built using the following products: