A 3D Biased Resonator: Stationary, Eigenfrequency, Frequency Domain, and Pull-In Analyses
Application ID: 11748
An electrostatically actuated MEMS resonator is simulated in the time and frequency domains. The device is driven by an AC + DC bias voltage applied across a parallel plate capacitor. The dependence of the resonant frequency on DC bias is assessed, and frequency domain and transient analyses are performed to investigate the device performance.
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