MEMS Microphone with Slip Wall

Application ID: 119191

This is a model of a MEMS microphone solved in the frequency domain including the DC prestress effects. The model is set up using the Electromechanics multiphysics interface, Thermoviscous Acoustics, and Pressure Acoustics. The microphone consists of a perforated plate and a prestressed membrane. The model uses the Slip Wall boundary condition to include the effects of high Knudsen numbers in the MEMS microphone. The slip velocity can be important for the flow through the holes in the microperforated plate (MPP) and for the squeezing flow between the perforated plate and the membrane.

This model example illustrates applications of this type that would nominally be built using the following products: