Piezoelectric MEMS Speaker

Application ID: 78021

This model analyzes a piezoelectric microelectromechanical system (MEMS) speaker. The speaker, composed of four triangular membranes, uses a layer of lead zirconate titanate (PZT) material with two electrodes on top of a silicon layer as actuators. The triangular membranes are separated by narrow gaps of air that allow for larger deflections of the membrane. The thermoviscous losses in the gaps limit the airflow, thus allowing the four actuators to behave acoustically as a single membrane.

This model example illustrates applications of this type that would nominally be built using the following products: