Piezoelectric MEMS Speaker
Application ID: 78021
This model analyzes a piezoelectric microelectromechanical system (MEMS) speaker. The speaker, composed of four triangular membranes, uses a layer of lead zirconate titanate (PZT) material with two electrodes on top of a silicon layer as actuators. The triangular membranes are separated by narrow gaps of air that allow for larger deflections of the membrane. The thermoviscous losses in the gaps limit the airflow, thus allowing the four actuators to behave acoustically as a single membrane.
This model example illustrates applications of this type that would nominally be built using the following products:
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
- COMSOL Multiphysics® and
- Acoustics Module and
- AC/DC Module, MEMS Module, Plasma Module, or Semiconductor Module
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.