Pull-In and Pull-Out Analysis of a Biased Resonator — 2D

Application ID: 22141

An electrostatically actuated MEMS resonator is simulated. The device is driven by an AC + DC bias voltage applied across a parallel plate capacitor. In this example, the pull-in and pull-out voltages of the resonator are computed. This is done via a quasi-static analysis of the displacement-voltage trajectory of the full range of motion, from the initial relaxed state all the way to the pulled-in flattened state.

This model example illustrates applications of this type that would nominally be built using the following products: