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Pull-in of an RF MEMS Switch

Application ID: 16379


This model analyzes an RF MEMS switch consisting of a thin micromechanical bridge suspended over a dielectric layer. A DC voltage greater than the pull-in voltage is applied across the switch, causing the bridge to collapse onto the dielectric layer with a resulting increase in the capacitance of the device. A penalty based contact force is implemented to model the contact forces as the bridge comes into contact with the dielectric.

This model is included as an example in the following products:

MEMS Module

The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.