Solidly Mounted Resonator 2D
Application ID: 101711
A solidly-mounted resonator (SMR) is a piezoelectric MEMS resonator formed on top of an acoustic mirror stack deposited on a thick substrate. This tutorial shows how to simulate an SMR in 2D. In this example, the eigenmodes were computed and the frequency response from 500 to 1200 MHz was analyzed. The computed impedance curve and displacement profile agree reasonably well with the simulation results found in literature.
This model example illustrates applications of this type that would nominally be built using the following products:
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
- COMSOL Multiphysics® and
- either the Acoustics Module, MEMS Module, or Structural Mechanics Module and
- either the AC/DC Module, MEMS Module, Plasma Module, or Semiconductor Module
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.