Thin-Film BAW Resonator with Equivalent Circuit
Application ID: 112881
This tutorial demonstrates how an electrical circuit model of a MEMS resonator can be derived using the Parameter Estimation feature. The model is a modified Butterworth-Van Dyke circuit created using the Electrical Circuit interface and represents a Thin-Film Bulk Acoustic Resonator (FBAR). Parameter Estimation study was used to solve for the parameters of the lumped elements in the model.
This model example illustrates applications of this type that would nominally be built using the following products:
however, additional products may be required to completely define and model it. Furthermore, this example may also be defined and modeled using components from the following product combinations:
- COMSOL Multiphysics® and
- either the Acoustics Module, MEMS Module, or Structural Mechanics Module and
- either the AC/DC Module, MEMS Module, Plasma Module, or Semiconductor Module and
- either the Battery Design Module, Chemical Reaction Engineering Module, Nonlinear Structural Materials Module, Optimization Module, or Polymer Flow Module
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.