J. Liu , V. B. Chalivendra , C. Goldsmith , W. Huang ,
 Department of Mechanical Engineering, University of Massachusetts - Dartmouth, Dartmouth, MA, USA
 MEMtronics Corporation, Richardson, TX, USA
Radio frequency (RF) micro-electro mechanical system(MEMS) switch works in on/off modes controlled by electrostatic forces. In off mode, rough surfaces of electrodes come into a contact to shunt the RF signal. Surface contact area has been recognized as a key factor in RF MEMS performance and reliability. Multi scale regular-fractal structure is observed on MEMS surface. Nonlinear Structural ...
A. K. Namdeo, N. Ramakrishna, H. B. Nemade[1,2], and R. P. Palathinkal
 Department of Electronics and Communication Engineering, Indian Institute of Technology Guwahati, Assam, India
 Centre for Nanotechnology. Indian Institute of Technology Guwahati, Assam, India
In this paper a finite element method(FEM) study of a surface acoustic wave (SAW)device excited by electrostatic coupling method is performed by using COMSOL Multiphysics. We have modeled a Rayleigh wave type SAW device by choosing YZ Lithium niobate as the substrate. The effect of external radio frequency (RF) field to the SAW device is analyzed. The effect of distance between the contactless ...
Dynamic Observation of Magnetic Particles in Continuous Flow Devices by Tunneling Magnetoresistance Sensors
A. Weddemann, A. Auge, F. Wittbracht, C. Albon, and A. Hütten
Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
Dynamic measurement of magnetic particles in continuous flow devices is made very difficult by the limitations imposed by the sensors themselves. Thus, certain sensor layouts are restricted to either number sensitive or spatial resolutive measurements of magnetic particles. We investigate different new strategies to increase the detection threshold and introduce designs accomplishing both: ...
O. Myers , M. Anjanappa , and C. Freidhoff 
 Mississippi State University, Mississippi State, MS, USA
 University of Maryland Baltimore County, Baltimore, MD, USA
 Northrop Grumman Corporation, Electronics Systems Sector, Baltimore, MD, USA
This paper presents a methodology towards designing, analyzing and optimizing piezoelectric interdigitated microactuators using COMSOL Multiphysics. The models used in this study were based on a circularly interdigitated design that takes advantage of primarily the d33 electromechanical piezoelectric constant coefficient. Because of the symmetric nature of the devices, 2D axisymmetric models ...
S. Suganthi, M. Anandraj, and L. Sujatha
Department of Electronics & Communication Engineering, Rajalakshmi Engineering College, Chennai, India
Department of Physics, Rajalakshmi Engineering College, Chennai, India
Porous Silicon (PS) can easily be formed by electrochemical etching of silicon in HF based electrolytes at room temperature. Since, PS is compatible with silicon IC technology; it finds lot of applications in the fabrication of MEMS devices. In the current study, we discuss the design of a condenser microphone using a Silicon/ Porous Silicon composite membrane as a movable plate. The performance ...
J. Yoo, H. Soh, J. Choi, S. Song
Department of Mechanical Engineering, Yonsei University, Korea
Hyundai Motor Co., Korea
Samsung Electronics Co., Ltd., Korea
Mando Co., Korea
Nanoscale structural analysis and design is presented. All the simulations are carried out using a finite element solver and optimization is performed using parameter and topology optimization schemes. It is concluded that COMSOL is effective for analysis and design of nanoscale structure design in electromagnetic field and it may be combined with several optimization methods to improve system ...
Empirical Model Dedicated to the Sensitivity Study of Acoustic Hydrogen Gas Sensors Using COMSOL Multiphysics®
A. Ndieguene, I. Kerroum, F. Domingue, A. Reinhardt
Laboratoire des Microsystèmes et de Télécommunications/Université du Québec à Trois-Rivières, Trois-Rivières, QC, Canada
Laboratoire d’Électronique et des Technologies de l’Information, CEA, LETI Grenoble, France
Due to the increasing demand for hydrogen gas sensors for applications such as automation, transportation, or environmental monitoring, the need for sensitive and reliable sensors with a short response time is increasing. This paper presents an empirical model that studies the sensitivity of acoustic hydrogen gas sensors. A parametric study based on the variation of physical properties of ...
Multiphysics Modelling and Simulation of Implantable Wireless MEMS Capacitive Sensor for Cardiovascular Diagnostics
R.Yogeswari, S.Venkateshwaran , K.Umapathi
United Institute of Technology,Coimbatore,Tamil Nadu, India
Monitoring the Central aorta is a more effective way to diagnose cardiovascular diseases than conventional techniques. Approximately, six million people in the world are currently living with aortic aneurysm and every year 750,000 new cases are diagnosed. This paper presents the design and simulation of biocompatible Wireless MEMS sensor for detection of intraoperative leaks of the stent graph ...
A. Fouquet , R. Orobtchouk , J. Hazart ,
 CEA-LETI, Grenoble, France
 Institut des Nanosciences de Lyon (INL), Villeurbanne, France
Nano patterning for chip manufacturing has reached its limitation with 193i lithography standard process. Directed Self Assembly (DSA) of Block Co-Polymers (BCP) is envisaged as an alternative complementary technique that can reduce critical dimension and pitch with high throughput and limited cost . For contact layers that require patterning of cylinders with diameter of tens nanometers, DSA ...
M. Baù, V. Ferrari, and D. Marioli
Department of Electronics for Automation, University of Brescia, Brescia, Italy
A contactless electromagnetic principle for the excitation of mechanical vibrations in resonant structures has been investigated. The principle relies on no specific magnetic property of the resonator except electrical conductivity and can be adopted for employing the structures as resonant sensors for measurements either in environments not compliant with the requirements of active electronics ...