D. Krizaj, I. Iskra, Z. Topcagic, and M. Remskar
University of Ljubljana, Faculty of Electrical Engineering, Ljubljana, Slovenia
Institut Jozef Stefan, Ljubljana, Slovenia
We are developing nanoparticle detector for airborn particles. The detection principle is based on condensation of nanoparticles forming micron sized water droplets and detection of the droplets by a capacitive type nanodetector. We have successfully performed some experimental evaluations of the detection principle and are in the stage of optimization of several parts of the system. As ...
R.V. Iyer, Vinay K., A. R. Kamath, A. Goswami, A. Sharma, A. V. Joshi, A. Mishra, N. S. Pai, S. Chakraborty, Rakesh D.
PES Institute of Technology, Bangalore, Karnataka, India
This abstract addresses the effect of scaling in air gap MOSFETs and determination of functional relationship between scaling parameter and sensitivity, frequency response. The modelling of the MOSFET and its simulations has been carried out using COMSOL Multiphysics. An air Gap MOSFET in its simplest form can be imagined to be one obtained by replacing the dielectric in a MOSFET with air. The ...
J. Yoo, H. Soh, J. Choi, S. Song
Department of Mechanical Engineering, Yonsei University, Korea
Hyundai Motor Co., Korea
Samsung Electronics Co., Ltd., Korea
Mando Co., Korea
Nanoscale structural analysis and design is presented. All the simulations are carried out using a finite element solver and optimization is performed using parameter and topology optimization schemes. It is concluded that COMSOL is effective for analysis and design of nanoscale structure design in electromagnetic field and it may be combined with several optimization methods to improve system ...
M. J. Hancock, N. H. Elabbasi, M. C. Demirel
Veryst Engineering, LLC., Needham, MA, USA
Pennsylvania State University, University Park, PA, USA
Pumping liquids at small scales is challenging because of the principle of reversibility: in a viscous regime, the flow streamlines through a fixed geometry are the same regardless of flow direction. Recently we developed a class of microfluidic pump designs based on tilted flexible structures that combines the concepts of cilia (flexible elastic elements) and rectifiers (e.g., Tesla pump). We ...
V. Vijayalakshmi, K. C. Devi
PSG College of Technology, Coimbatore, Tamil Nadu, India
In this work, a bimetallic strip based thermal sensor was designed using MEMS module of COMSOL Multiphysics® software to monitor the temperature rise in insulating oil which was used as coolant in transformers. The bimetallic strip was designed with different shapes such as cylindrical, rectangle, square & conical and different compositions such as Al/Steel Alloy and Fe/Cu which can withstand ...
R. Dufour , C. Wu, F. Bendriaa, V. Thomy, and V. Senez
BioMEMS Group, IEMN, University of Lille Nord de France, Villeneuve d’Ascq, France
This paper presents an Analog to Digital Microfluidic Converter (ADMC) using passive valves and enabling the conversion of a continuous liquid flow into droplets for Electro-Wetting On Dielectric (EWOD) actuation. Valves calibration, geometry characteristics and losses reduction have been optimized using microfluidic application mode of COMSOL Multiphysics®.
S. Suganthi, M. Anandraj, and L. Sujatha
Department of Electronics & Communication Engineering, Rajalakshmi Engineering College, Chennai, India
Department of Physics, Rajalakshmi Engineering College, Chennai, India
Porous Silicon (PS) can easily be formed by electrochemical etching of silicon in HF based electrolytes at room temperature. Since, PS is compatible with silicon IC technology; it finds lot of applications in the fabrication of MEMS devices. In the current study, we discuss the design of a condenser microphone using a Silicon/ Porous Silicon composite membrane as a movable plate. The performance ...
S. Logeshkumar, L. Lavanya, G. Anju, and M. Alagappan
PSG College of Technology
Tamil Nadu, India
In the model silicon nanorods are designed as cantilever array and coated with thin film of aluminum or aluminum nitride, to be characterized, thus, adding a detectable mass and altering the cantilever resistance to bending. The simulated results show that when films of different thickness are placed on the cantilever, there is a corresponding change in the resonant frequency and the ...
V. Sista, and E. Bhattarchaya
Microelectronics and MEMS Lab
Department of Electrical Engineering
Indian Institute of technology Madras
A MEMS based Knudsen’s pressure gauge working in the range of 1e-5 mbar to 10 mbar is designed and simulated in COMSOL. The working principle is based on Knudsen’s forces that arise when two plates are held at different temperatures and their separation is comparable to the mean free path of the ambient gas molecules. The forces change the separation between the plates and capacitance between ...
Multiphysics Modeling and Simulation of MEMS based Variometer for Detecting the Vertical Speed of Aircraft in Avionics Applications
K. Umapathi, K. Sukirtha, C. Sujitha, K. A. Noushad, Venkateswaran, R. Poornima, R. Yogeswari
United Institute of Technology, Coimbatore, Tamil Nadu, India
Sri Krishna College of Engineering and Technology, Coimbatore, Tamil Nadu, India
The objective of this work is to develop a MEMS based Variometer to measure the vertical speed and to sense the instantaneous rate of climb or descent in Aircrafts to meet the miniaturization requirements in avionics industry. The design consists of dielectric material in between two micro electrodes. The micro diaphragm is placed on one of the electrode. As the aircraft changes altitude, the ...