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Simulation and Fabrication of Wireless Passive MEMS Pressure Sensor
E.A. Unigarro Calpa[1], D.A. Sanz Becerra[1], A. Arciniegas[2], F. Ramirez[1], F. Segura-Quijano[1]
[1]Universidad de los Andes, Bogotá, Colombia
[2]Instituto Barraquer de América, Bogotá, Colombia
A wireless passive pressure sensor and the measurement system were design and simulated using COMSOL 4.3. The sensor is based on MEMS capacitor attached to a planar inductor for wireless powering and readout. An external coil is used for the measuring system. The pressure to be measured compresses the MEMS capacitor and changes sensor\'s resonance frequency. COMSOL 4.3 was used for the analysis ...
Design and Simulation of MEMS-based Sensor for Artificial Hand
P. Prema[1], Sakthivishnu.R[1], Sowmya. R[1], Chandra Devi K[1], Meenakshi Sundaram. N[1]
[1]PSG College of Technology, Coimbatore, Tamil Nadu, India
An artificial hand is the one that replaces the hand lost through trauma, disease, or congenital conditions. The proposed design is to simulate a sensor, used in prosthetic hand so as to measure the pressure required to hold the object, using COMSOL Multiphysics®. The physical parameters such as size, shape and mass of the object were optimized so as to hold an object. The weight of the object ...
Simulation of an AlN Thin Film Resonator for High Sensitivity Mass Sensors
M. Maitra [1], H. B. Nemade [1], S. Kundu [1],
[1] Indian Institute of Technology Guwahati, Guwahati, Assam, India
The objective of this paper is to show the simulation of a piezoelectric thin film device and its application as a sensor. Piezoelectric aluminum nitride thin film clamped at two ends is simulated using COMSOL Multiphysics software. The device consists of the piezoelectric thin film suspended on a cavity etched on a silicon substrate. Two metal electrodes are placed at the two fixed sides of the ...
A Consistent Environment for the Numerical Prediction of the Properties of Composite Materials
J. Schumacher[1], P. Fideu[2], G. Ziegmann[1], and A. Herrmann[3]
[1]TU Clausthal-Institute of Polymere Materials and Plastic Engineering, Clausthal-Zellerfeld, Germany
[2]CTC GmbH Stade, Stade, Germany
[3]Faserinstitut Bremen e.V., Bremen, Germany
The current paper focuses on the creation of a consistent environment for the numerical prediction of the physical properties of polymer composite. A limitation factor for the successful simulation of composite processes is the correct estimation of the effective properties depending on several factors such as the constituents (fiber, polymer), the process setup. The numerical prediction of the ...
Strong Magnetic Field and Its Application
Y. Song
Huazhong University of Science and Technology, Wuhan, China
High magnetic field research has yielded fruitful results. Since 1913, associated with the magnetic field there are 19 Nobel Prizes, including a prize for medicine, five chemistry prizes, and 13 physics prizes. In recent years, the international community under the conditions of strong magnetic field is very active in scientific research, involving many disciplines such as physics, chemistry, ...
Design and Development of Microsystems within a Corporate Research Environment by Utilizing Comsol Multiphysics
A. Frey
Siemens AG
Corporate Research & Technologies
Munich, Germany
Alexander Frey received his M.A. degree from the University of Texas, Austin, in 1994, the Dipl. Phys. degree from the University of Wuerzburg, Germany in 1997 and the PhD from the Saarland University, Germany in 2010. In 1997 he joined Research Laboratories of Siemens working on the design of DRAM sensing circuits. In 1999 he joined Corporate Research, Infineon, Munich, Germany. He was engaged ...
Air Convection on a Micro Hotplate Gas Sensor
S. Gidon[1], M. Brun[1], S. Nicoletti[1], P. Barritault[1]
[1]Commissariat Energie Atomique, LETI, Minatec Campus, Grenoble, France
Monitoring of indoor CO2 concentration is of particular interest to detect room occupancy in order to optimize power consumptions of building. One approach to monitor the indoor CO2 concentration is to use optical detection using specific absorption lines of CO2 molecules in the infrared domain close to 4.2 µm. Such optical sensors include a detector, typically a micro-bolometer, an IR source ...
3D Stationary and Temporal Electro-Thermal Simulations of Metal Oxide Gas Sensor Based on a High Temperature and Low Power Consumption Micro-Heater Structure
N. Dufour[1], C. Wartelle[2], P. Menini[1]
[1]LAAS-CNRS, Toulouse, France
[2]Renault, Guyancourt, France
The aim of this work was to simulate the electro-thermal behavior of a micro-hotplate used as a gas sensor, in order to compare the obtained results with a real structure. The structure has been designed in 3D and a stationary and a temporal study has been realized.
Reliability Enhancement of Bio MEMS based Cantilever Array Sensors for Antigen Detection System using Heterogeneous Modular Redundancy
L. S. Sundharam[1]
[1]Kumaraguru college of Technology, Coimbatore, Tamil nadu, India
The objective of the work is to propose a reliability enhancement model for antigen detection system (ADS) using bio MEMS based cantilever array sensors using heterogeneous modular redundancy technique. The reliability of the ADS is expressed in terms of the constituent sub systems which are heterogeneous not only in their respective structures and behaviors but also in their forms. The possible ...
Mechanical Model of RF MEMS Capacitor Structures
R. Chatim[1]
[1]University of Kassel, Kassel, Germany
In order to design an RF MEMS based device, it is beneficial to have information concerning mechanical behavior. For model verification purpose, solution offered by simulation software equipped with predefined physics application is one valuable way to provide initial reference. To avoid unwanted particular total strain in RF MEMS structures, a compensation layer can be utilized. When the number ...
