硅通孔在实现高级集成系统中起着至关重要的作用，但是其发展受到多物理场耦合效应的极大阻碍。硅通孔的多物理场耦合过程非常复杂，热场分布、电磁场分布及结构分布是相关联、相互作用的。针对硅通孔的多物理场耦合问题，本文开展了硅通孔多物理场仿真分析研究。结合国内外在硅通孔多物理场本质研究的基础上，从多物理场耦合理论出发，建立单个硅通孔的多物理场分析模型。通过运用 COMSOL Multiphysics 软件进行建模如图 1，在稳态下选择相应的焦耳热和热膨胀接口进行仿真如图 2，经影响分析确定了硅通孔的一些结构参数，如二氧化硅隔层厚度取 0.8um，硅基质厚度取 5.5um，硅通孔高度取 83.6um。最后，选择焦耳热接口进行瞬态仿真，研究了电压周期函数的幅值大小和占空比对硅通孔温度变化的影响关系。数值结果表明，随着幅值的增大，最终稳定后，温度的波动范围和最高温度都将增大如图 3；随着占空比不断增大 ...
M. Gobbert, and S. Yang
Department of Mathematics and Statistics, University of Maryland, Baltimore, MD, USA
The convergence order of finite elements is related to the polynomial order of the basis functions used on each element, with higher order polynomials yielding better convergence orders. However, two issues can prevent this convergence order from being achieved: the lack of regularity of the PDE solution and the poor approximation of curved boundaries by polygonal meshes. We show studies for ...
Massachusetts Institute of Technology, Cambridge, MA, USA
Markus Zahn received all his education at MIT, was a professor in the Department of Electrical Engineering at the University of Florida, Gainesville from 1970-1980, and then joined the MIT Department of Electrical Engineering and Computer Science faculty in 1980. He works in the Laboratory for Eelectromagnetic and Eelectronic Systems, in the MIT High Voltage Research Laboratory, is the Director ...
E. Kamau, and F. Voigt
University of Oldenburg, Germany
Cantilever vibration modes were simulated with COMSOL Multiphysics. In the 1st approach the model consisted of an excitation piezo, a holder plate and a chip where the cantilever was mounted on. A sinusoidal voltage signal was applied to the piezo in the simulation, which resulted in movements of the holder plate and finally led to the excitation of the cantilever. In the 2nd approach the model ...
R. Hamou, P. Biedermann, M. Rohwerder, and A. Blumeneau
Max-Planck-Institut für Eisenforschung GmbH, Düsseldorf, Germany
The present work focuses on modeling a new experimental technique: Scanning Electro-chemical Potential Microscopy (SECPM), which is used to probe the potential profile of the electric double layer (EDL). We used an electrostatic approach to compute the EDL potential measured within the metallic probe. Also, we investigated the effect of the interaction of the electrode/probe double layers on the ...
D. Scandura, G. Currenti, and C. Del Negro
Istituto Nazionale di Geofisica e Vulcanologia Sezione di Catania, Catania, Italy
In volcanic areas, the presence of heterogeneous materials and high temperatures affect the rheological behaviour of the Earth's crust that calls for considering the anelastic properties of the medium surrounding the magmatic sources. A thermo-mechanical numerical model is performed for evaluating the temperature dependency of the elasto-plastic solution. Both temperature distributions and ...
N.M. Bruno, C. Ciocanel and A. Kipple
Department of Mechanical Engineering, Northern Arizona University, Flagstaff, Arizona, USA
Dept. of Electrical Engineering and Computer Sciences, Northern Arizona University, Flagstaff, Arizona, USA
This paper presents the approach taken through the utilization of COMSOL Multiphysics 3.5a, to develop a model that simulates the flow of a magnetorheological (MR) fluid through a micro-channel. The model was developed as an aid in the analysis of a micropump that produces flow by means of displacement of a MR fluid slug within a microchannel.
L. Braci, S. Ognier, and S. Cavadias
Laboratoire de Génie des Procédés Plasmas et Traitements de Surfaces, Ecole Nationale Supérieure de Chimie de Paris, University Pierre et Marie Curie, Paris, France
Non-thermal plasma, generated in atmospheric pressure discharges, has been investigated in our laboratory in order to treat highly diluted (300 ppm to 1000 ppm) volatile pollutant. The collision of electrons created in the discharge with atmospheric air, leads to the formation of reactive species that can totally or partially oxidize the pollutants at near ambient temperature. The purpose of the ...
M. Cavenago, P. Veltri, E. Gazza, G. Serianni, and P. Agostinetti
INFN-LNL, Legnaro, Padova, Italy
Consorzio RFX, Padova, Italy
The development of powerful negative ion sources requires precise and versatile simulation tools to predict the emittance of the extracted ion beams and the heat load on the electrodes. A first tool is a determination of the plasma beam interface which is accomplished by a set of macro based in the COMSOL Multiphysics environment. Notwithstanding the strong nonlinearities involved, a proper ...
N. Martaj, P. Rochelle, L. Grosu, R. Bennacer, and S. Savarese
Universitè de Paris, Paris, France
Institut Jean Le Rond d'Alembert, Université Paris 6
Laboratoire LEEVAM «Environnement, Energétique, Valorisation, Matériaux», Universitéde Cergy-Pontoise
COMSOL France, 5 pl. R Schuman, 38000 Grenoble
The alternative engines of Stirling type, are engines running on "hot air", using both an external heat source and regeneration. They should be considered as an alternative for the effective conversion of renewable energy sources into work, with their theoretical yield equal to the theoretical Carnot limit. The output efficiency and the power of these engines are strongly related to the ...