Thin-Film BAW Composite Resonator
Application ID: 5784
Bulk Acoustic Wave (BAW) resonators can be used as narrow band filters in radio-frequency applications. The chief advantage compared with traditional ceramic electromagnetic resonators is that BAW resonators, thanks to the acoustic wavelength being much smaller than the electromagnetic wavelength, can be made much smaller.
In addition to the desired bulk acoustic mode, the resonator structure may have many spurious modes with very narrow spacing. The design goal is usually to maximize the quality of the main component and to reduce the effect of spurious modes.
This example shows how you can model thin film BAW resonators in 2D using eigenfrequency and frequency response analysis.
This model is included as an example in the following products:MEMS Module
however additional products may be needed to reproduce it. This example may be created and run using components from the following product combinations:
- COMSOL Multiphysics® and
- either the Acoustics Module, MEMS Module, or Structural Mechanics Module and
- either the AC/DC Module, MEMS Module, Plasma Module, or Semiconductor Module
The combination of COMSOL® products required to model your application depends on several factors and may include boundary conditions, material properties, physics interfaces, and part libraries. Particular functionality may be common to several products. To determine the right combination of products for your modeling needs, review the Specification Chart and make use of a free evaluation license. The COMSOL Sales and Support teams are available for answering any questions you may have regarding this.