The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical disciplines. You can use these examples as a starting point for your own simulation work by downloading the tutorial model or demo app file and its accompanying instructions.
Search for tutorials and apps relevant to your area of expertise via the Quick Search feature. Note that many of the examples featured here can also be accessed via the Application Libraries that are built into the COMSOL Multiphysics® software and available from the File menu.
This tutorial demonstrates how an electrical circuit model of a MEMS resonator can be derived using the Parameter Estimation feature. The model is a modified Butterworth-Van Dyke circuit created using the Electrical Circuit interface and represents a Thin-Film Bulk Acoustic Resonator ... Read More
Surface micromachined thin films are often subject to residual stress. This COMSOL Multiphysics example describes a thin film resonator with straight or folded cantilever beam springs. The resonance frequencies of the resonator are affected by thermal stress. Using folded springs ... Read More
This models pressure-dependent heating of 4 inch wafer on unipolar electrostatic chuck. Wafer sits on top of ring with electrostatic force holdong down wafer to counter upward pressure from gas flowing in gap between wafer and chuck surface. It is a problem involving 4 coupled physics ... Read More
In this tutorial, the vibrational behavior of a small aluminum plate with four waveguide structures is analyzed. This is an example of a structural component located in a device where elastic waves are propagating, like a smart speaker, an electric motor, or a MEMS device. The plate can ... Read More
This model analyzes the operation of a micromirror in air and the effects of thermoviscous damping on the vibration response. The model includes thermal losses in the structure as well as thermoviscous acoustic phenomena. The model couples the Thermoelasticity multiphysics interface to ... Read More
This model shows how to analyze a simple, cantilever based, piezoelectric energy harvester. A sinusoidal acceleration is applied to the energy harvester and the output power is evaluated as a function of frequency, load impedance and acceleration magnitude. Read More
This model shows how to create dispersion diagrams from simulation results by extending the tutorial Thin-Film BAW Composite Resonator. The dispersion curve can be plotted against both real and imaginary values of the wave number, corresponding to the propagating modes and evanescent ... Read More
This tutorial example is kindly provided by Dr. James Ransley at Veryst Engineering, LLC. This model continues from the base model “A Micromachined Comb-Drive Tuning Fork Rate Gyroscope”, which is also provided by Dr. Ransley. The model demonstrates how to accurately compute the effects ... Read More
Many piezoelectric materials are ferroelectric. Ferroelectric materials exhibit nonlinear polarization behavior, such as hysteresis and saturation at large applied electric fields. In addition, the polarization and mechanical deformations in such materials can be strongly coupled due to ... Read More
This model analyzes the thermal expansion in a MEMS device, such as a microgyroscope, where thermal expansion should be minimized. The device is made from the copper-beryllium alloy UNS C17500 and uses temperature-dependent material properties from the Material Library. The purpose of ... Read More