The Application Gallery features COMSOL Multiphysics® tutorial and demo app files pertinent to the electrical, structural, acoustics, fluid, heat, and chemical disciplines. You can use these examples as a starting point for your own simulation work by downloading the tutorial model or demo app file and its accompanying instructions.
Search for tutorials and apps relevant to your area of expertise via the Quick Search feature. Note that many of the examples featured here can also be accessed via the Application Libraries that are built into the COMSOL Multiphysics® software and available from the File menu.
Plasma discharges containing chlorine are commonly used to etch semiconductors and metals in microelectronics fabrication. This tutorial model studies chlorine plasma discharges using a global (volume-averaged) diffusion model. Global diffusion models can run simulations in a fraction ... Read More
This tutorial model solves for a one-dimensional capacitively coupled plasma reactor in a mixture of argon/oxygen. Important aspects and strategies for modeling electronegative discharges are discussed. Read More
The electron energy distribution function (EEDF) plays an important role in the overall behavior of discharges. Analytic forms of the EEDF exist such as Maxwellian or Druyvesteyn, but in some cases they fail to fit the discharge physics. This tutorial model investigates the effects of ... Read More
This model simulates electrical breakdown in an atmospheric pressure gas. Modeling dielectric barrier discharges in more than one dimension is possible, but the results can be difficult to interpret because of the amount of competing physics in the problem. In this simple model the ... Read More
This tutorial model presents a study of a double-headed streamer in nitrogen at atmospheric pressure. An initial seed of electrons is placed between two electrodes which apply an initial electric field of 52 kV/cm to the gas. A negative and positive streamer propagate toward the ... Read More
This model investigates the National Institute of Standards and Technology (NIST) Gaseous Electronics Conference (GEC) reference cell in two dimensions using the Plasma, Time Periodic interface. A 2D example helps in understanding the physics without excessive CPU time. The cell is ... Read More
This model simulates a plasma at medium pressure (2 torr) where the plasma is still not in local thermodynamic equilibrium. At low pressures the two temperatures are decoupled but as the pressure increases the temperatures tend towards the same limit. Read More
This tutorial models an ICP reactor by solving plasma fluid type equations fully coupled with the homogeneous and time-independent electron Boltzmann equation in the classical two-term approximation. The approximated Boltzmann equation is solved for each position of space and is coupled ... Read More
Wave heated discharges may be very simple, where a plane wave is guided into a reactor using a waveguide, or very complicated as in the case with ECR (electron cyclotron resonance) reactors. In this example, a wave is launched into reactor and an Argon plasma is created. The wave is ... Read More
This model solves the Boltzmann equation in two-term approximation for a mixture of nitrogen and oxygen representing a background gas of dry air. Electron transport coefficients and source terms are computed by suitable integration of the electron energy distribution function over ... Read More
