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Capacitive Accelerometer Characteristics Study
B. S. Kavitha[1], S. B. Rudraswamy[1], C. R. Venugopal[1]
[1]SJCE, Mysore, Karnataka, India
This paper will describe the dependence of capacitive accelerometer characteristics on the accelerometers physical dimension and its material properties. The sense element of the accelerometer is designed on the basis of a commercially available torsion based accelerometer technology. The sense element consists of an asymmetrically shaped flat plate of metal supported above a substrate surface ...
Tunable MEMS Capacitor for mm and μm Wave Generation
Arpita Das[1], Amrita Nandy[1], Sakuntala Mahapatra[1], Sk. Mohammed Ali[1], Minu samantary[1]
[1]National MEMS design centre ,Department of Electronics and Telecommunication, Trident Academy of Technology, Biju Pattnaik University of Technology , India
This paper demonstrates the design of a tunable MEMS capacitor with two plates (one movable and one fixed). The response time obtained is 5μs. The tunable capacitor plays an important role in RF circuits. We focus on a tunable capacitor simulated using COMSOL Multiphysics®. In an electrostatically tunable parallel plate capacitor, you can modify the distance between the two plates when the ...
Multiple-Mode Polymeric-Silicon Dual-Channel Gas Sensors
K. Liang [1], A. Dodabalapur [1], D. Sharma [1],
[1] Microelectronics Research Center, University of Texas, Austin, TX, USA
An organic-inorganic dual-channel sensor makes a strong chemical gas sensor because this device design combines the high chemical sensitivities and selectivity of organic semiconductors [1-4] with the superior electrical performance and convenient integration of silicon semiconductors. As shown in the device schematic in Figure 1, the organic channel is the chemically-active material and is ...
Analysis of Geometrical Aspects of a Kelvin Probe
I. Kuehne [1], S. Ciba [1], A. Frey [2],
[1] Heilbronn University, Kuenzelsau, Germany
[2] University of Applied Sciences, Augsburg, Germany
The presented analysis investigates the capacitance characteristic of a Kelvin probe regarding the geometrical transition from a movable electrode plate to a narrow tip. Moreover, predictions can be done concerning optimum geometry, sensitivity and suitable electrical measurement circuitry. A further aim of this study is to provide optimal tip geometries for different sized Kelvin probes. This ...
Numerical Modeling of a MEMS Sensor with Planar Coil for Magnetic Flux Density Measurements
J. Golebiowski[1], S. Milcarz[1]
[1] Department of Semiconductor and Optoelectronics Devices, Technical University of Lodz, Lodz, Poland
The silicon cantilever with the planar coil was applied to the magnetic flux density measurements. The influence of shape and dimensions of planar coil on magnetic energy density was described. In cause of magnetic anisotropy of analyzed silicon structure FEM method and couple field method was applied in simulation. The Lorentz force based sensors owing to their potentially simpler ...
Droplet Generation by Means of a Two-Fluid Probe
B.P. Cahill[1], M. Quade[1], G. Gastrock[1], K. Lemke[1], J. Metze[1], and D. Beckmann[1]
[1]Institut für Bioprozess und Analysenmesstechnik e.V., Rosenhof, Heilbad Heiligenstadt, Germany
This paper presents a simulation of the operation of a new type of droplet generation probe. This probe, consisting of two concentrically-arranged tubings, is immersed in a beaker of cell medium so that oil is pumped through the outer tubing at a pumping speed less than fluid is drawn into the inner tubing. In this way, droplets of cell medium are entrained into the outlet tubing forming a ...
Analog to Digital Microfluidic Converter
R. Dufour [1], C. Wu[1], F. Bendriaa[1], V. Thomy[1], and V. Senez[1]
[1]BioMEMS Group, IEMN, University of Lille Nord de France, Villeneuve d’Ascq, France
This paper presents an Analog to Digital Microfluidic Converter (ADMC) using passive valves and enabling the conversion of a continuous liquid flow into droplets for Electro-Wetting On Dielectric (EWOD) actuation. Valves calibration, geometry characteristics and losses reduction have been optimized using microfluidic application mode of COMSOL Multiphysics®.
Simulation of DC Current Sensor
K. Suresh, B.V.M.P.S. Kumar, U.V. Kumar, M. Umapathy, and G. Uma
National Institute of Technology Tiruchirapalli, Tamil Nadu, India
A proximity DC current sensor using of a piezo sensed and actuated cantilever beam with a permanent magnet mounted at its free end is designed and simulated in COMSOL Multiphysics. The change in resonant frequency of cantilever is a measure of the current through the wire. The sensor is found to be linear with good sensitivity.
Multiphysics and Simulation of MEMS based Bolometer for Detecting the Radiations in Nuclear Power Plants
K. Umapathi[1], S. Swetha[2], K. Ranjitha[2], K. Vinodh[2], K. Deebiga[1], R. Harisudarsan[1]
[1]United Institute of Technology, Coimbatore, TamilNadu, India
[2]Sri Krishna College of Engineering and Technology, Coimbatore, Tamil Nadu, India
High performance micro sensors are important to detecting special nuclear materials radiations in different fields to save the globe. This paper is mainly focused on to develop a MEMS based bolometer for detecting the nuclear radiation to provide the high security in Nuclear power Plants. A thermally sensitive micro metal plate is designed and placed on a substrate through micro thermal link. ...
Interactive Design of an Electrostatic Headphone Speaker Using COMSOL Server™
B. A. Marmo [1], M. P. Snaith [1],
[1] Xi Engineering Consultants, Edinburgh, United Kingdom
An electrostatic headphone includes many interrelated design elements that affect the frequency response of the headphone and the users listening experience. Xi Engineering Consultants (XI) partnered with Warwick Audio Technologies (WAT) to investigate the complex behavior of one-side electrostatic speakers. Xi developed a GUI that helped WAT engineers optimize their speaker using virtual tools ...
