MEMS Modeling in COMSOL Multiphysics®

March 21–24, 2023 11:00 a.m. EDT

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If you are interested in learning how to model microelectromechanical systems (MEMS) with the COMSOL Multiphysics® software, this is the course for you. During this 4-day MEMS-based course, we will show you how to use the built-in physics interfaces in COMSOL Multiphysics® and the add-on MEMS Module.

By the end of the course, you will know how to build models for a range of MEMS devices, including electrostatically actuated resonators, accelerometers, piezoelectric devices, and thermal actuators. We will also teach you about coupling physics phenomena related to the mechanical, electrical, thermal, and fluid effects required for modeling a MEMS device. Additionally, we will discuss important concepts in MEMS devices, such as damping, frequency-response analysis, and modeling electromechanical forces.

Day 1

11 a.m.–2 p.m. EDT

The training course will begin with a step-by-step introduction to MEMS modeling so that you can see the COMSOL Multiphysics® modeling workflow in action. Then, the course will transition to focus on MEMS applications. The following topics will be covered:

  • Overview of the MEMS Module
  • Modeling tools for MEMS simulations
  • Electromagnetic–structural analysis
  • Moving mesh
  • Analysis types: stationary, frequency-response, eigenvalue, and biased analyses

2–3 p.m. EDT: * Work on exercises

Day 2

11 a.m.–2 p.m. EDT

The second day will build on the training from the first day with a focus on modeling piezoelectric devices. The learning session will cover the following topics:

  • Structural, viscous, thin-film, and support damping
  • Modeling piezoelectric and piezoresistive devices
  • Material properties and material orientation
  • User-defined coordinate systems
  • Losses in piezoelectric materials

2–3 p.m. EDT: * Work on exercises

Day 3

11 a.m.–2 p.m. EDT

The third day will focus on some of the more advanced topics within MEMS modeling, including multiphysics coupling. The following topics will be covered:

  • Multiphysics analysis:
    • Thermoelasticity
    • Thermal stresses and Joule heating
    • Fluid–structure interaction
    • Acoustic–structure interaction

2–3 p.m. EDT * Work on exercises

Day 4

11 a.m.–2 p.m. EDT

The last day will focus on general modeling topics, such as:

  • Solver strategies
  • Visualization and presentation of results

2–3 p.m. EDT: * Work on exercises

Suggested Background This course assumes some familiarity with the basics of MEMS. We strongly recommend that those new to COMSOL Multiphysics® take an intensive COMSOL Multiphysics® course prior to attending this class.

Pricing & Payment Methods

The price for this online training course is $795 per person.

  • We offer an academic discount to those who qualify. The academic rate for this course is $595.

We accept payment by credit card, company purchase order, check, wire, or direct deposit. For security purposes, please do not send credit card information via email.

This training course will be recorded, and the recording will be made available to all paid registrants.

Mail payments or purchase orders to:

100 District Avenue
Burlington, MA 01803

Fax purchase orders to:

ATTN: Training
(781) 273-6603

Piezoelectric Rate Gyroscope

Please review our course cancellation/return policies. For additional information, please email

Register for MEMS Modeling in COMSOL Multiphysics®

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Training Course Details

Local Start Time:
March 21–24, 2023 | 11:00 a.m. EDT (UTC-04:00)
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