MEMS Modeling in COMSOL Multiphysics^®

If you are interested in learning how to model microelectromechanical systems (MEMS) with the COMSOL Multiphysics^® software, this is the course for you. During the 4-day MEMS-based course, we will show you how to use the built-in physics interfaces in COMSOL Multiphysics^® and the add-on MEMS Module.

By the end of the course, you will know how to build models for a range of MEMS devices, including electrostatically actuated resonators, accelerometers, piezoelectric devices, and thermal actuators. We will also teach you about coupling physics phenomena related to the mechanical, electrical, thermal, and fluid effects required for modeling a MEMS device. Additionally, we will discuss important concepts in MEMS devices, such as damping, frequency-response analysis, and modeling electromechanical forces.

Day 1

11 a.m.–5 p.m. EDT

The training course begins with a step-by-step introduction to MEMS modeling so that you can see the modeling workflow in action. Then, the course will transition to focus on MEMS applications. The following topics will be covered:

• Overview of the MEMS Module
• Small-strain linear elastic, geometric nonlinear, frequency-response, eigenvalue, and biased analyses
• Electromagnetic–structural analysis
• Moving mesh
• Structural, viscous, thin-film, and support damping

Day 2

11 a.m.–5 p.m. EDT

The second day builds on the training from the first day with a focus on the modeling of piezoelectric devices. The session will cover the following topics:

• Modeling piezoelectric and piezoresistive devices
  • Material properties and material orientation
  • User-defined coordinate systems
  • Losses in piezoelectric materials
• Magnetostriction

Day 3

• Work on exercises (no class)

Day 4

11 a.m.–5 p.m. EDT

The last day focuses on some of the advanced topic of MEMS modeling, including multiphysics coupling. The following topics will be covered:

• The visualization and presentation of results
• Multiphysics analysis:
  • Thermoelasticity
  • Thermal stresses and Joule heating
  • Fluid–structure interaction
  • Acoustic–structure interaction

Suggested Background

This course assumes some familiarity with the basics of MEMS. We strongly recommend that those new to COMSOL Multiphysics^® take an intensive COMSOL Multiphysics^® course prior to attending this class.

Pricing & Payment Methods

The price for this online training course is $795 per person.

We offer an academic discount to those who qualify. The academic rate for this course is $595.

We accept payment by credit card, company purchase order, check, wire, or direct deposit. For security purposes, please do not send credit card information via email.

This training course will be recorded, and the recording will be made available to all paid registrants.

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Mail payments or purchase orders to:

COMSOL, Inc. 100 District Avenue Burlington, MA 01803

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Fax purchase orders to:

COMSOL, Inc. ATTN: Training (781) 273-6603

end2col Please review our course cancellation/return policies. For additional information, please email course@comsol.com