Semiconductor Manufacturing Models
To demonstrate how the COMSOL Multiphysics® software can be used for modeling semiconductor manufacturing equipment, processes, and devices, we create example models and other guides on a regular basis. Browse example models and see suggested add-on modules in this resource collection.
COMSOL Models for Download
All documentation and MPH-files are free to download via the links below, but please note that you need a COMSOL® software license or trial to open the MPH-files. The examples can be used as a starting point for your own simulation work or simply as inspiration.
Wafer Production
Epitaxial Growth of SiC by the PVT Method
Photoresist Spin Coating
Czochralski Crystal Growth Furnace
Heating Circuit
Fabrication
ICP Reactor
GEC CCP Reactor
Argon/Chlorine ICP Reactor with RF Bias
Ultrahigh Vacuum CVD
Microlithography Lens
Laser Heating of a Silicon Wafer
Chemical Etching
Ion-Implant Vacuum System
Packaging & Testing
IGBT Module: Four-Point Bending Test
IGBT Module: Stress Analysis Under the HAST Condition
Preconditioning of SMDs for Testing
Reflow Soldering in IC Packaging
Viscoplastic Creep in Solder Joints
Devices
Trench-Gate IGBT
Bipolar Transistor
MOSFET
Product Spotlight
It all starts with COMSOL Multiphysics®, the platform product for creating physics-based models and simulation applications. From there, you can add as many specialized modules and interfacing products as needed — they all connect seamlessly via the platform for a consistent modeling workflow regardless of what you are modeling.
Here are some suggested products to add to COMSOL Multiphysics® for modeling semiconductor manufacturing equipment, processes, and devices:
Flexible License Options
COMSOL offers a variety of license types to meet the needs of different types of organizations and teams.