Semiconductor Manufacturing Models

To demonstrate how the COMSOL Multiphysics® software can be used for modeling semiconductor manufacturing equipment, processes, and devices, we create example models and other guides on a regular basis. Browse example models and see suggested add-on modules in this resource collection.

COMSOL Models for Download

All documentation and MPH-files are free to download via the links below, but please note that you need a COMSOL® software license or trial to open the MPH-files. The examples can be used as a starting point for your own simulation work or simply as inspiration.

Wafer Production

Epitaxial Growth of SiC by the PVT Method

Photoresist Spin Coating

Czochralski Crystal Growth Furnace

Heating Circuit


ICP Reactor

GEC CCP Reactor

Argon/Chlorine ICP Reactor with RF Bias

Ultrahigh Vacuum CVD

Microlithography Lens

Laser Heating of a Silicon Wafer

Chemical Etching

Ion-Implant Vacuum System

Packaging & Testing

IGBT Module: Four-Point Bending Test

IGBT Module: Stress Analysis Under the HAST Condition

Preconditioning of SMDs for Testing

Reflow Soldering in IC Packaging

Viscoplastic Creep in Solder Joints


Trench-Gate IGBT

Bipolar Transistor

Product Spotlight

A computer running the COMSOL Multiphysics software with an IGBT module model in the Graphics window.

It all starts with COMSOL Multiphysics®, the platform product for creating physics-based models and simulation applications. From there, you can add as many specialized modules and interfacing products as needed — they all connect seamlessly via the platform for a consistent modeling workflow regardless of what you are modeling.

Here are some suggested products to add to COMSOL Multiphysics® for modeling semiconductor manufacturing equipment, processes, and devices:

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Flexible License Options

COMSOL offers a variety of license types to meet the needs of different types of organizations and teams.

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