Plasma Module Updates

For users of the Plasma Module, COMSOL Multiphysics® version 6.1 provides the ability to model coupled plasma reactors with a periodic RF bias, a new Plasma Chemistry add-in that creates a complete plasma chemistry from a text file for models, and four new tutorial models. Read more about these updates below.

Inductively Coupled Plasma with RF Bias Multiphysics Interface

The new Inductively Coupled Plasma with RF Bias multiphysics interface couples the Plasma, Time Periodic and Magnetic Fields interfaces to model inductively coupled plasma (ICP) reactors with a capacitive radiofrequency periodic excitation. The magnetic field is solved in the frequency domain, and the plasma transport equations are solved for a periodic steady state. This interface is dedicated to the modeling of plasma reactors with inductive and capacitive power coupling mechanisms and can be viewed in the new Model of an Argon and Chlorine Inductively Coupled Plasma Reactor with RF Bias model.

A reactor model in the Thermal Wave and Prism color tables. Simulation results of an inductively coupled plasma reactor with RF bias operating in a mixture of argon and chlorine.

Plasma Chemistry Add-In

The Plasma Chemistry add-in automatically creates a complete plasma chemistry from a text file for models using the Plasma and Plasma, Time Periodic interfaces. With the add-in, you can specify the aspects of a plasma chemistry in the file, such as species properties like thermodynamic parameters, electron impact reactions from cross sections and rate constants, heavy species reactions, and surface reactions. The following new models use this feature:

A close-up view of the Model Builder with the Plasma Chemistry node highlighted, the corresponding Settings window, and a Notepad window opened on the right. The Plasma Chemistry add-in (left) is used to import an argon–chlorine plasma chemistry file (right). The plasma features are automatically created by the add-in.

New Tutorial Models

COMSOL Multiphysics® version 6.1 brings four new tutorial models to the Plasma Module.